This is an experimental device for organic EL. The operation of the transport system can be controlled from a PC. It is the completed form of a fully automatic cluster-type film deposition device.
Sixteen organic evaporation cells (KOD-Cell) for organic EL film formation are equipped, and a metal evaporation cell is standard for metal material deposition. Both the organic and metal cells are configured with small-sized crucibles to minimize chamber contamination within the device chamber. This system is fully automated, making it a multipurpose research and development device capable of conducting a wide variety of research.
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basic information
**Features** - Capable of mask and sample transport using a 3-axis robotic mechanism. - Equipped with a vacuum sealing mechanism for the substrate holder in the transport chamber. - Co-evaporation of organic materials is possible (up to 4 components). - Up to 8 types of organic materials can be prepared in the same chamber. - Two organic evaporation chambers allow for the installation of 16 organic evaporation sources. - Standard water-cooled jacket to prevent contamination between organic and metal materials. - Substrates and masks can be exchanged in a vacuum environment within the evaporation chamber. - The gap between the substrate and mask is minimized. - The substrate rotation mechanism ensures a film thickness distribution flatness within ±5%. - The organic evaporation cell has excellent directionality and minimal material contamination within the evaporation chamber. - Each processing chamber has a special surface treatment for rapid attainment of the operating vacuum environment pressure. - Can be connected to a glove box. - Plasma substrate cleaning is possible in the pre-treatment chamber. - The introduction chamber can stock a standard of 12 substrate and mask holders. - Automatic transport, automatic exhaust, and automatic evaporation are possible with PLC control.
Price information
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Price range
P9
Delivery Time
Applications/Examples of results
[Applications] - Development of organic EL materials - Development of polymer materials - Development of phosphorescent materials - Development of organic thin-film solar cells - Development of organic electronic devices, etc.
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Company information
The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.