Successful Improvement Case Study 4: Modification of Organic EL Film Deposition Equipment
Case 4: Modification of Organic EL Film Deposition Equipment
Successful Improvement Case Study Case 4: Modification of Organic EL Film Formation Equipment
◆◇◆Background◆◇◆ Until now, we have been using organic EL deposition equipment from another company. However, there have been the following issues and requests regarding its use. ◆ Since there is no mask exchange mechanism, it is necessary to open the atmosphere each time the mask is changed, which can cause damage to the samples. Additionally, the lack of a consistent vacuum environment leads to wasted time. ◆ In the organic deposition chamber, there are currently up to six deposition cells, but we would like to utilize the existing vacuum chamber to increase expandability and conduct various experiments.
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◆◇◆Countermeasures◆◇◆ ◆Proposed a change from the current 2-axis manipulator (vertical axis and rotational axis) to a 3-axis manipulator (vertical axis, rotational axis, and mask vertical axis). (From the current 2-axis manipulator to the new 3-axis manipulator fabrication) ◆Proposed a design for the lower flange that maximizes the installation capability of our organic vapor deposition cell (KOD-Cell). (Organic vapor deposition cell: up to 8 sources can be installed, metal deposition cell: up to 3 sources can be installed) ◆◇◆Results◆◇◆ ◆Designed and fabricated a new 3-axis manipulator. In conjunction with this, additional control functions were constructed on a new PLC control panel, enabling docking with the existing control system. By allowing the substrate holder and mask holder to be transported separately, the scalability of experiments has significantly increased, enabling various experimental patterns. ◆Designed and fabricated a new lower flange. A configuration was established where 8 sources of the organic vapor deposition cell (KOD-Cell) can be installed on the outer perimeter, and a 3-source metal deposition cell (KMDT-Cell) can be installed in the center. Previously, the room was only for organic vapor deposition, but now metal deposition is also possible, greatly increasing the scalability of experiments and enabling various material depositions.
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The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.