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  5. Distance measuring device
  6. Microscope-mounted optical heterodyne displacement meter

Microscope-mounted optical heterodyne displacement meter

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HVM-400、HVM-250

last updated:May 08, 2020

フォトンプローブ
フォトンプローブ
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Measuring extremely small displacement amounts non-contact using laser light! A optical heterodyne displacement meter suitable for measuring transient response phenomena.

A probe type optical heterodyne displacement meter with one probe and one emission is installed at the top of the microscope tube, allowing for simultaneous measurement of displacement while observing with the microscope. 【Features】 ○ Pinpoint measurement of the measurement point on the object ○ Parallel measurement possible while observing the state of the object ○ Equipped with a reflected illumination system and a CCD camera, allowing the object to be viewed as a regular microscope, while using the CCD camera to observe the state of the measurement surface on a display (CRT) ○ Various devices can be attached to the stage ○ Automation is possible by attaching an automatic stage to the stage ○ The size of the configuration differs depending on whether a manual stage or an automatic stage is used. ○ Either HV400 or HV250 can be selected for the heterodyne displacement meter. ● For other functions and details, please download the catalog.

    Distance measuring device
optical

Microscope-mounted optical heterodyne displacement meter

optical heterodyne displacement sensor.jpg
optical heterodyne displacement sensor.jpg

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basic information

A light heterodyne displacement meter with a single probe and single emission type probe is installed at the top of the microscope tube, allowing for simultaneous observation with the microscope and measurement of displacement. 【Features】 ○ Pinpoint measurement of the target object ○ Parallel measurement possible while observing the state of the target object ○ By attaching a reflected illumination system and CCD camera, the target object can be visualized as a regular microscope, and the state of the measured surface can be observed on a display (CRT) using the CCD camera ○ Various devices can be attached to the stage ○ Automation is possible by installing an automatic stage on the stage ○ The size of the configuration differs depending on whether it is a manual stage or an automatic stage. ○ Either HV400 or HV250 can be selected for the heterodyne displacement meter ● For other functions and details, please download the catalog.

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Applications/Examples of results

【Applications】 ○ Measurement of displacement distribution of micro shapes ○ Measurement of surface roughness and waviness distribution ○ Measurement of the correlation between overall image and variations in micro parts ○ Simultaneous observation and measurement of the overall image

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Microscope-mounted optical heterodyne displacement meter

Microscope-mounted optical heterodyne displacement meter

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We have established 'High-precision measurement of physical quantities using light' as our management policy. Optical measurement technology has become an indispensable element of modern cutting-edge technology. We are confident that the demand for high-precision measurement will grow stronger with the advancement of science. By combining high-precision measurement with the excellent properties of light—non-invasive, non-intrusive, non-contact, and high-precision—we can expect further technological innovation. It may not be suitable for measuring mass-produced items, nor for online measurements. However, we are committed to making it useful for cutting-edge industries that require high-precision measurement of physical quantities.

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