High-purity silica glass products essential for the semiconductor manufacturing process.
High-purity silica glass products that are essential for high-temperature operations in the semiconductor manufacturing process and do not undergo chemical changes with active gases. 【Features】 - Ideal for various equipment and fixtures, including CVD and diffusion furnace tubes. - A full lineup of quartz products necessary for semiconductor manufacturing processes: - Overflow tanks: Used in the wafer cleaning process for chemical treatment, accommodating various needs including products for 12-inch wafers. - Horizontal boats: Quartz boats used in the cleaning and reaction processes of wafers. - Vertical process tubes: Used in critical reaction processes such as diffusion in semiconductor manufacturing, accommodating the increasing diameter due to the introduction of 12-inch wafers. - Fin insulation tubes: Used for insulation at the bottom of vertical tubes; products using opaque quartz can also be manufactured. ● We offer a variety of other products. Please contact us for more details.
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basic information
High-purity silica glass products that are essential for high-temperature operations in the semiconductor manufacturing process and do not undergo chemical changes with active gases. 【Features】 ○ Ideal for various equipment and fixtures, including CVD and diffusion furnace tubes. ○ A full lineup of quartz products necessary for semiconductor manufacturing processes: - Overflow tanks Used in the wafer cleaning process for chemical treatment, accommodating various needs including products for 12-inch wafers. - Horizontal boats Quartz boats used in the cleaning and reaction processes of wafers. - Vertical process tubes Used in critical reaction processes such as diffusion in semiconductor manufacturing, accommodating the increase in diameter due to the introduction of 12-inch wafers. - Fin insulation tubes Used for insulation at the bottom of vertical tubes, with products made from opaque quartz also available. ● We offer a variety of other products. Please contact us for more details.
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Applications/Examples of results
【Usage】 ○ CVD ○ Various diffusion furnace core tubes
Company information
FerroTec Holdings Co., Ltd. is actively engaged in three business segments based on product applications and market fields: "Equipment-related business," "Solar cell-related business," and "Electronic device business." In the new energy and electronics industries, we propose high-quality products and services while providing cost-competitive products and services. Additionally, we prioritize activities that consider the global environment as one of our key management issues, progressively adapting to the latest environmental regulatory requirements, developing materials and products that can be utilized in the new energy industry, and contributing to the resolution of global environmental issues. FerroTec Holdings Co., Ltd. aims to contribute to society through manufacturing that leverages core technologies and to remain a company where stakeholders, including customers, shareholders, employees, business partners, and the local community, can enjoy growth.
