Remote Internet management realized, vacuum gas analysis management device.
This is an RGA device that determines the quality of vacuum in the apparatus (normal/abnormal). Until now, RGA management control, which had distance limitations using serial cables or LAN (Ethernet), can now be accessed from anywhere in the world where there is an internet connection, allowing control beyond distances. Not only does it improve ease of use, but it also opens up new possibilities for process monitoring and e-Diagnostics. 【Specifications】 ◇Mass range: 1-100 / 1-200 amu ◇Resolution: ≦10% valley (between peaks of the same height within the mass range) 【Features】 ○Low cost & compact 1.9 kg (controller weight) ○Easy installation and can be used with minimal maintenance. ○Built-in Ethernet interface of 10Base-T and embedded web server, enabling direct operation using the internet environment. *For more details, please inquire through the document request.
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basic information
This is an RGA device that distinguishes the quality of vacuum in the apparatus (normal/abnormal). Until now, RGA management control, which had distance limitations using serial cables or LAN (Ethernet), can now be accessed from anywhere in the world where there is an internet connection, allowing control beyond distances. Not only does it improve ease of use, but it also opens up new possibilities for process monitoring and e-Diagnostics. 【Specifications】 ◇Mass range: 1-100 / 1-200 amu ◇Resolution: ≦10% valley (between peaks of the same height within the mass range) 【Features】 ○Low cost & compact at 1.9 kg (controller weight) ○Easy installation and can be used with minimal maintenance. ○Built-in 10Base-T Ethernet interface and embedded web server enable direct operation using the internet environment. *For more details, please inquire through the document request.
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Applications/Examples of results
- Management of overseas factories and control of the headquarters factory during business trips - Vacuum gas management in the LCD, PV industry, and semiconductor pre-processing processes - Management of vacuum chamber operations in research laboratories - Troubleshooting outside of working hours, etc.
Company information
Our company is a global leading company that provides the latest technologies in manufacturing processes for growth industries, including thin film applications such as semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications such as medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the globe.