Universal throttle valve
Throttle (butterfly) valve for vacuum pressure control with a variable valve body from 0 to 90° 【Features】 ○ By using in conjunction with the ACX controller, high-speed response and high reproducibility of vacuum pressure control can be achieved in processes such as semiconductor manufacturing. ○ Various types and sizes of flanges are available. ○ Custom manufacturing inquiries are also welcome. ○ Maximum differential pressure: 1 atmosphere ○ Fully closed mode: 1/10000 F.S. conductance ○ Motor: 2-phase stepping motor ○ Gas contact materials: SUS, Teflon, Ni, etc. ● For other functions and details, please contact us.
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basic information
Throttle (butterfly) valve for vacuum pressure control by varying the valve body from 0 to 90°. 【Features】 ○ By using in conjunction with the ACX controller, high-speed response and high reproducibility of vacuum pressure control can be achieved in processes such as semiconductor manufacturing. ○ Various types and sizes of flanges are available. ○ Custom manufacturing inquiries are also welcome. ○ Maximum differential pressure: 1 atmosphere. ○ Fully closed mode: 1/10000 F.S. conductance. ○ Motor: 2-phase stepping motor. ○ Gas contact materials: SUS, Teflon, Ni, etc. ● For other functions and details, please contact us.
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Megatoll Corporation delivers reliable trust in the fields of semiconductor equipment, analytical instruments, and vacuum technology.
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