Ultra-compact microwave plasma source SMPS-201
A super compact microwave-excited plasma source developed for installation and use in the middle of gas lines and exhaust lines. 【Features】 ○ The plasma chamber is made of high-purity alumina, allowing for visual observation of the discharge. ○ Electrode-less discharge. Achieves high-density plasma through a new microwave supply method. ○ Extremely safe against microwave leakage due to a completely shielded structure. ○ Fully air-cooled, eliminating the need for cooling water. ○ Capable of using various active gases. ○ Microwaves are supplied via a coaxial cable, eliminating the need for cumbersome waveguide connections. ○ Equipped with an igniter for easier discharge. ○ The weight of the plasma source itself is a lightweight design of only 1.9 kg. ● For other functions and details, please download the catalog.
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basic information
A super compact microwave-excited plasma source developed for installation and use in the middle of gas lines and exhaust lines. 【Features】 - The plasma chamber is made of high-purity alumina, allowing for visual observation of the discharge. - Electrode-less discharge. Achieves high-density plasma through a new microwave supply method. - Extremely safe against microwave leakage due to a fully shielded structure. - Completely air-cooled, eliminating the need for cooling water. - Compatible with various active gases. - Microwaves are supplied via a coaxial cable, eliminating the need for cumbersome waveguide connections. - Equipped with an igniter for easier discharge. - The weight of the plasma source itself is a lightweight design at just 1.9 kg. ● For other functions and details, please download the catalog.
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Applications/Examples of results
【Applications】 ○ Chamber cleaning, contamination removal ○ Installation in the gas line to improve process speed ○ Activation of the main plasma ○ Promotion of gas decomposition ○ Decomposition of exhaust gases to reduce the burden on the exhaust treatment system
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Company information
In 1972, the first president, Horita, established Taisei Sangyo Co., Ltd. using the entrance of his home as a workplace, and since then, we have been dedicated to technology development and research. Initially, we were involved in the development of devices such as the Polack counter for the Meteorological Research Institute, starting our work in the field of atmospheric science. Subsequently, we expanded our work into the vacuum world by starting maintenance services for leak detectors. Around the 10th anniversary of our founding, work in ultra-high vacuum began to increase, and by the 15th anniversary, we were able to manufacture small devices. Currently, our scope of work has significantly expanded, not only covering ultra-high vacuum, MBE, CVD, ECR, and RF radical sources, but also advancing the development of functional components utilizing various plasmas, ions, or electrons. In the future, we aim to become a small enterprise that can truly compete in the world of cutting-edge technology.