K13X is filler-free, so there is no particle generation due to degradation.
Typically, the polymer material used for O-rings, perfluoroelastomer, employs a reinforcing material called filler to achieve rigidity and resistance. The K13X new material polymer has a molecular structure that enhances rigidity within the material itself, allowing for a filler-free structure.
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basic information
【Features】 ○ New material filler-free structure (particle-free) ○ Excellent plasma resistance, low etching rate ○ Low thermal expansion ○ Excellent physical properties (low friction, high strength, high elasticity) ● For more details, please contact us.
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Delixon Technology Japan Co., Ltd. engages in the buying and selling of used semiconductor equipment and peripherals, as well as providing repair services for robots, RF power supplies, matching boxes, VAT valves, and other peripherals related to semiconductor manufacturing equipment.