Simultaneous non-contact cleaning of both sides of the wafer, even for submicron particles.
◆ High cleaning capability achieved through fine jet and ED jet compatible with chemical solutions. ◆ Maintenance-free and damage-free achieved through non-contact cleaning (brushless cleaning). ◆ Enables cleaning and drying processes in a single stage. ◆ No heater required due to the completely room temperature process, significantly reducing power consumption. ◆ Compact installation area and high layout flexibility achieved through function-specific unit configuration.
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basic information
The wafer is placed horizontally, and the adoption of a sheet-fed fine jet method achieves high cleaning capability. The SpinSonic Cleaner removes even submicron particles. Furthermore, it reduces the number of processes, eliminating the need for chemical management and heaters. It demonstrates excellent performance that enables a reduction in cleaning time and savings in running costs.
Price information
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Delivery Time
P4
Applications/Examples of results
Cleaning before and after the epi process Cleaning after CMP Cleaning after polishing Cleaning before annealing Cleaning before and after film formation such as CVD, nitride films, and oxide films
Company information
Since its establishment in 1982, Pretech has consistently created super cleaning systems in various fields of ultra-precision cleaning. In particular, our fine series of megasonic cleaning and cassette-less cleaning have been developed early on and have received high praise both domestically and internationally. Additionally, Pretech promotes the development of new technologies based on industry-academia collaborative research. We are engaged in joint development with Tohoku University on energy-saving, high-quality sheet-type cleaning machines, as well as with Yamagata University, Tokyo Institute of Technology, and Chuo University. Moving forward, we aim to realize three policies: a thorough commitment to customer-first priority, the establishment and maintenance of a quality assurance system, and the development and application of cutting-edge technologies. We strive to create and provide attractive products that earn the trust and satisfaction of our customers, while also contributing to society by improving the environment and health and safety. To grow and develop as a true venture company, we will continue our research and development of cutting-edge technologies in precision cleaning, promoting Japanese-origin technologies to the world, and making Japan a solid technological nation through the collective efforts of all our employees.