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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Cassette-less cleaning device (for wafer cleaning)

Cassette-less cleaning device (for wafer cleaning)

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Cassette-less cleaning device

last updated:Oct 01, 2010

プレテック
プレテック
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It is possible to remove particles without causing damage using Fine Sonic.

<Features> - Eliminates uneven cleaning of the cassette contact area. - Achieves greater cleanliness with a reduced amount of solution in the tank. - Significantly reduces power consumption. - Minimizes the amount of solution during inter-tank movement. - Uses Fine Sonic (high-frequency oscillator / transducer) to remove particles without causing damage.

    Other semiconductor manufacturing equipment
カセットレス洗浄装置0228.jpg

Cassette-less cleaning device (for wafer cleaning)

カセットレス洗浄装置0228.jpg
カセットレス洗浄装置0228.jpg

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basic information

Smooth robot transport without chipping allows for significant reduction in running costs. Moreover, the use of Fine Sonic further enhances quality. The cassette-less cleaning device, which incorporates various super clean technologies, is the definitive solution for semiconductor cleaning, addressing all the issues associated with cassettes in the cleaning process.

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Semiconductor, for wafer cleaning.

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プレテック

プレテック

Industrial Machinery

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Since its establishment in 1982, Pretech has consistently created super cleaning systems in various fields of ultra-precision cleaning. In particular, our fine series of megasonic cleaning and cassette-less cleaning have been developed early on and have received high praise both domestically and internationally. Additionally, Pretech promotes the development of new technologies based on industry-academia collaborative research. We are engaged in joint development with Tohoku University on energy-saving, high-quality sheet-type cleaning machines, as well as with Yamagata University, Tokyo Institute of Technology, and Chuo University. Moving forward, we aim to realize three policies: a thorough commitment to customer-first priority, the establishment and maintenance of a quality assurance system, and the development and application of cutting-edge technologies. We strive to create and provide attractive products that earn the trust and satisfaction of our customers, while also contributing to society by improving the environment and health and safety. To grow and develop as a true venture company, we will continue our research and development of cutting-edge technologies in precision cleaning, promoting Japanese-origin technologies to the world, and making Japan a solid technological nation through the collective efforts of all our employees.

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The related categories of Other semiconductor manufacturing equipment

  • Manufacturing and processing machinery
  • Semiconductor Manufacturing Equipment
  • Other semiconductor manufacturing equipment
          

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