This is a high-temperature compatible model of the high-performance digital mass flow controller MC-3000L series, which has a variety of features.
This is a high-temperature digital mass flow controller in a 1.125-inch size that achieves high precision of 1.0% F.S. with proprietary patented technology. It is ideal for controlling high-temperature gases such as water vapor. 【Features】 ○ RoHS compliant ○ Operating temperature up to 120°C, baking temperature up to 150°C (non-energized) ○ Equipped with a digital interface RS-485 ○ Features a sensor with proprietary patented technology ○ High-temperature compatible, high-precision digital MFC *For other functions and details, please download the catalog.
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basic information
○ RoHS compliant ○ Operating temperature up to 120°C, baking temperature up to 150°C (non-energized) ○ Equipped with a digital interface RS-485 ○ Equipped with proprietary patented sensor technology ○ High-temperature compatible, high-precision digital MFC
Price information
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Price range
P3
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, liquid crystal, solar cell, and electronic component manufacturers, as well as their equipment manufacturers.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.