Optimal for use in a vacuum environment where oil cannot be used.
A special oil-free LM guide optimized for use in high vacuum environments where oil cannot be used. It utilizes a newly developed fixed lubrication S film for the rolling elements. Additionally, since no grease is used and all components are made of stainless steel, it achieves low outgassing and low dust generation.
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basic information
● Use of stainless steel All components for special environments are made of stainless steel. ● Degreasing cleaning Degreasing treatment has been applied using a cleaning agent. ● No grease used No grease is used at all; instead, a highly reliable solid lubrication S film is adopted. ● Low friction The oil-free LM guide for special environments exhibits excellent low friction characteristics in both atmospheric and vacuum conditions. ● Low dust generation The oil-free LM guide for special environments demonstrates superior low dust generation compared to conventional vacuum grease lubrication. ● Long lifespan The oil-free LM guide for special environments has a longer lifespan compared to conventional solid lubrication.
Price information
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Applications/Examples of results
Semiconductor, FPD manufacturing equipment, exposure equipment, organic EL manufacturing equipment, ion implantation equipment.
Company information
THK pioneered the "rolling" of linear motion components in machines in 1972 and developed the "linear motion system." The development of this "linear motion system" has led to increased precision, speed, labor-saving, and improved efficiency in machinery, enabling energy-efficient equipment design. All of THK's technology is focused on providing greater lightness and precision to the "movement" of various mechanisms, bringing numerous innovations to the world. 【THK's Main Product Areas】 1. Mechanical Component Parts: - Development, manufacturing, and sales of LM guides, ball splines, ball screws, electric actuators, etc. 2. Mechatronics Related Products: - Precision XY stages, linear motor actuators, etc. 3. Automotive Parts: - Link balls, rod ends, etc. 4. Robotics: - Pick and place robots "PPR," transport robots "SIGNAS," service robots "SEED-Solutions" (including display robots and temperature measurement robots), etc. 5. Seismic Isolation: - Seismic isolation tables TSD, seismic isolation modules TGS.
