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  6. Electric Actuator DX (Precision Stage) [THK Official]

Electric Actuator DX (Precision Stage) [THK Official]

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Precision Stage Series DX

last updated:Apr 04, 2022

THK
THK
  • Official site

High rigidity and capable of accommodating low spaces with a reduced height.

The THK electric actuator precision stage series DX (hollow XY stage) is a high-rigidity, low-profile hollow XY stage. By arranging each axis, guide center, and drive center of the feed ball screw at the same height, it minimizes posture changes and enables high-precision positioning. Additionally, on the related links, we have prepared a wealth of technical information, including more detailed product descriptions, product catalogs, user manuals, specification drawings, dimension tables, and 2D CAD files. Please take a look at those as well.

    ActuatorOther machine elementsSemiconductor inspection/test equipment
DX.jpg

Electric Actuator DX (Precision Stage) [THK Official]

DX.jpg
DX.jpg
  • Related Link - https://www.ea-thk.com/?q=ea_jp/node/1199&xadid=a0…

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basic information

● Hollow Structure To create a hollow structure in the center, a cross LM guide CSR is used in the guide frame, and the drive ball screw is positioned on the outside. This allows for measurement and processing of the workpiece on the table from both the top and bottom, making it applicable to various applications. ● Saddle-less XY Stage The cross LM guide CSR is placed at the four corners of a high-rigidity hollow frame, resulting in a simple, high-rigidity, and low-height structure. ● High-Precision Positioning Structure - By adopting a high-precision machined cross LM guide CSR in the guide frame, a high-precision XY structure is achieved. - The guide center of each axis and the drive center of the feed ball screw are positioned at nearly the same height, creating an ideal structure. This allows for minimal posture changes during feeding, enabling high-precision positioning. Additionally, the structure allows for easy installation of linear scales, facilitating even higher precision closed-loop control.

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THK

THK

Machine elements and parts

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THK pioneered the "rolling" of linear motion components in machines in 1972 and developed the "linear motion system." The development of this "linear motion system" has led to increased precision, speed, labor-saving, and improved efficiency in machinery, enabling energy-efficient equipment design. All of THK's technology is focused on providing greater lightness and precision to the "movement" of various mechanisms, bringing numerous innovations to the world. 【THK's Main Product Areas】 1. Mechanical Component Parts: - Development, manufacturing, and sales of LM guides, ball splines, ball screws, electric actuators, etc. 2. Mechatronics Related Products: - Precision XY stages, linear motor actuators, etc. 3. Automotive Parts: - Link balls, rod ends, etc. 4. Robotics: - Pick and place robots "PPR," transport robots "SIGNAS," service robots "SEED-Solutions" (including display robots and temperature measurement robots), etc. 5. Seismic Isolation: - Seismic isolation tables TSD, seismic isolation modules TGS.

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