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  6. Electric Actuator EX (Precision Stage) [THK Official]

Electric Actuator EX (Precision Stage) [THK Official]

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Precision Stage Series EX

last updated:Apr 04, 2022

THK
THK
  • Official site

Achieves excellent responsiveness with a low-inertia structure.

THK's electric actuator precision stage series EX (XY stage) is a simple XY stage that does not use a saddle structure like conventional types. By minimizing the weight of the operating unit and suppressing the inertial forces of each axis, we have achieved excellent high-speed responsiveness. Additionally, on the related links, we have prepared a wealth of technical information, including more detailed product descriptions, product catalogs, user manuals, specification drawings, dimension tables, and 2D CAD files. Please take a look at this as well.

    ActuatorOther machine elementsSemiconductor inspection/test equipment
EX_20091103.jpg

Electric Actuator EX (Precision Stage) [THK Official]

EX_20091103.jpg
EX_20091103.jpg
  • Related Link - https://www.ea-thk.com/?q=ea_jp/node/1200&xadid=a0…

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basic information

● Simple XY Structure This is a simple XY stage that uses a cross LM guide CSR within the guide frame and does not employ a saddle like conventional XY stages. ● Excellent Responsiveness The structure utilizing the cross LM guide CSR eliminates the intermediate saddle and adopts a special structure that also fixes the two-axis motors. This allows for extreme weight reduction of the moving parts, minimizes the inertia forces of each axis, and achieves excellent high-speed responsiveness. ● High-Rigidity XY Stage By using a cross LM guide CSR with four-directional equal loading in the XY guide frame, the radial rigidity is higher compared to stages using cross roller guides. ● Play-Free Coupling Mechanism The drive unit of the X-axis integrates linear motion guidance LM guides and drive ball screws, adopting a space-saving, high-rigidity, and high-precision KR. The connection with the top table is provided with appropriate preloading using LM guide HSR, resulting in a play-free structure.

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THK

THK

Machine elements and parts

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THK pioneered the "rolling" of linear motion components in machines in 1972 and developed the "linear motion system." The development of this "linear motion system" has led to increased precision, speed, labor-saving, and improved efficiency in machinery, enabling energy-efficient equipment design. All of THK's technology is focused on providing greater lightness and precision to the "movement" of various mechanisms, bringing numerous innovations to the world. 【THK's Main Product Areas】 1. Mechanical Component Parts: - Development, manufacturing, and sales of LM guides, ball splines, ball screws, electric actuators, etc. 2. Mechatronics Related Products: - Precision XY stages, linear motor actuators, etc. 3. Automotive Parts: - Link balls, rod ends, etc. 4. Robotics: - Pick and place robots "PPR," transport robots "SIGNAS," service robots "SEED-Solutions" (including display robots and temperature measurement robots), etc. 5. Seismic Isolation: - Seismic isolation tables TSD, seismic isolation modules TGS.

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