Loading System EFEM
Loading system developed for 300mm wafers 【Features】 ○ In addition to operability, it can dock with various devices such as image measurement and automatic measuring machines. ○ By adopting the BBS (Building Block System), it allows for the addition of options according to the application, enabling an efficient system configuration that fits the budget. ● For other functions and details, please download the catalog.
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Loading system developed for 300mm wafers 【Features】 ○ In addition to operability, it can dock with various devices such as image measurement and automatic measuring machines. ○ By adopting the Building Block System (BBS), it is possible to add options according to the application, enabling an efficient system configuration that fits the budget. ● For other functions and details, please download the catalog.
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Leveraging our experience in the development of semiconductor-related equipment, we established a company with a small team of production technology experts to undertake development tasks that are difficult for large corporations to accomplish in a short period of time, while also focusing on cost performance. Our motivation is to utilize our ideas to enter the market, promote Japanese production that can compete globally, and revive the declining "manufacturing Japan." We are challenging ourselves to develop and supply precision slide mechanisms that can respond to low costs and short delivery times, which large companies are unable to achieve.