ウイング Product Lineup

X-axis stage on a stone base plate Linear motor stage mounted on a gantry frame with a Y-axis stage 【Features】 ○ Achieves high precision by separating the XY axes ○ Equipped with a suction table compatible with 650mm square size workpieces ○ Optimal for various processes of large substrates ○ Adopts parallel drive on the Y-axis Achieves constant velocity of less than 1% and enables reading at low speeds ○ Adopts multi-carrier drive on the X-axis Allows for a dual-head configuration, easily increasing throughput ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

Manual prober compatible with 8-inch wafers equipped with an X-Y stage 【Features】 ○ Equipped with an X-Y stage 　Simple remote control such as fast forward and jog feed is possible from the operation panel ○ Quickly moves to measurement points, offering excellent operability ○ A prober designed with user needs in mind, prioritizing low cost, high precision, and short delivery times ● For other functions and details, please download the catalog.

• Image Processing Equipment

Granite base adopted! Semi-auto prober capable of high-precision positioning 【Features】 ○ By using a granite stone plate for the base and equipping a linear shaft motor for the drive motor, it is possible to achieve a backlash of '0'. ○ High-precision positioning is possible, corresponding to the accuracy/resolution of the linear scale. ○ Equipped with a manual loader, making the loading and unloading of wafers easy. ● For other functions and details, please download the catalog.

• Image Processing Equipment

XY-axis stage driven by a linear motor on a stone base plate, equipped with a Z-axis unit driven by a ball screw on a gantry frame, forming a compact XYZ stage. 【Features】 ○ The Z-axis can accommodate imaging equipment such as microscopes, making it ideal for inspection processes up to 300mm in size. ○ Compared to a standard 4-axis unit, the height of the high-precision X-Y-θ axes can be kept low through linear drive, resulting in no table shake and excellent uniformity even during high-speed movement. ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

Equipped with a zoom microscope! A probe focused on work efficiency with a standard 15-inch LCD color monitor. 【Features】 ○ Long working distance improves work efficiency ○ Uses a zoom lens for easy observation without positional deviation ○ Equipped with an electric Z stage To retract the microscope and positioner up to 140 mm Making workpiece attachment and detachment easy ○ Fine positioning structure considering reproducibility ○ Allows for two-handed operation ● For other functions and details, please download the catalog.

• Image Processing Equipment

Loading system developed for 300mm wafers 【Features】 ○ In addition to operability, it can dock with various devices such as image measurement and automatic measuring machines. ○ By adopting the BBS (Building Block System), it allows for the addition of options according to the application, enabling an efficient system configuration that fits the budget. ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

Wafer sorter for 6 and 8-inch wafers capable of registering up to 8 types of recipes 【Features】 ○ Transfers wafers between wafer cassettes using a 3-axis cylindrical coordinate robot ○ Specifications include 3 cassettes, including one for extraction ○ Slot designation corresponding to numbers is possible ○ Settings for OCR and alignment ON/OFF are available ○ Usable in a clean room environment ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

Gantry-type linear motor stage adopting a square pipe welded structure 【Features】 ○ The gantry axis is equipped with a two-axis stage, allowing for the installation of a workpiece receiving section and conveyor in between. The configuration of a camera head axis and a transmitted lighting axis can be easily realized, making it ideal for inspection devices. ○ Achieves lightweight design. ○ Adopts multi-carrier drive on the X-axis, enabling a dual-head configuration and easily increasing throughput. ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

A thin XY-axis stage that achieves high speed stability and high precision positioning by adopting a low center of gravity structure, while being a linear guide. 【Features】 ○ By adopting parallel drive for the X and Y axes, the height of the upper table can be kept low, preventing overall device vibration during high-speed operation and improving accuracy. ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

Optimal 5-axis stage for vertical exposure devices 【Features】 ○ A multi-axis stage equipped with Z-axis, θ-axis, and tilting functions in addition to the XY axes ○ Equipped with functions necessary for mask alignment ○ Designed for vertical placement, enabling particle-free operation ○ Can be used in a space-saving manner ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

XY axis stage with a cut-out type that enables simultaneous inspection of both sides of the workpiece. 【Features】 ○ The stage is constructed as a single unit with a pipe-structured frame. ○ Ample space is secured on the backside. ○ High rigidity at a low cost. ○ Weight reduction is possible. ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

Air slide stage that enables high speed stability and ultra-high precision positioning through the adoption of linear motor drive and air guide. 【Features】 ○ The work mounting table is supported by a granite base via air bearings, ensuring high movement parallelism and rigidity. ○ Both movable and drive parts are non-contact, contributing to dust prevention and noise reduction, making it suitable for use in clean rooms. ○ A full-floating method is adopted for the movable parts, allowing for high rigidity specifications and ultra-high precision finishing. ● For other functions and details, please download the catalog.

• Other semiconductor manufacturing equipment

6-inch manual type wafer loader 【Features】 ○ Transfers wafers from the cassette to the microscope's transfer position and stores them back in the cassette after the work is completed. ○ The wafers to be inspected can be selected. ○ The orifice angle can be set in 90-degree increments (optional). ● For other functions and details, please download the catalog.

• Substrate transport device (loader/unloader)
• Other semiconductor manufacturing equipment