Gantry fixed-type stage (stone base)
X-axis stage on a stone base plate Linear motor stage mounted on a gantry frame with a Y-axis stage 【Features】 ○ Achieves high precision by separating the XY axes ○ Equipped with a suction table compatible with 650mm square size workpieces ○ Optimal for various processes of large substrates ○ Adopts parallel drive on the Y-axis Achieves constant velocity of less than 1% and enables reading at low speeds ○ Adopts multi-carrier drive on the X-axis Allows for a dual-head configuration, easily increasing throughput ● For other functions and details, please download the catalog.
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X-axis stage on a stone base plate Linear motor stage mounted on a gantry frame with a Y-axis stage 【Features】 ○ Achieves high precision by separating the XY axes ○ Equipped with a suction table compatible with workpieces sized 650mm square ○ Ideal for various processes of large substrates ○ Adopts parallel drive for the Y-axis Achieves constant speed variation of less than 1%, allowing for low-speed reading ○ Adopts multi-carrier drive for the X-axis Enables a dual-head configuration, easily increasing throughput ● For other functions and details, please download the catalog.
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Leveraging our experience in the development of semiconductor-related equipment, we established a company with a small team of production technology experts to undertake development tasks that are difficult for large corporations to accomplish in a short period of time, while also focusing on cost performance. Our motivation is to utilize our ideas to enter the market, promote Japanese production that can compete globally, and revive the declining "manufacturing Japan." We are challenging ourselves to develop and supply precision slide mechanisms that can respond to low costs and short delivery times, which large companies are unable to achieve.
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