High-precision linear stage vertical 5-axis stage
Optimal 5-axis stage for vertical exposure devices 【Features】 ○ A multi-axis stage equipped with Z-axis, θ-axis, and tilting functions in addition to the XY axes ○ Equipped with functions necessary for mask alignment ○ Designed for vertical placement, enabling particle-free operation ○ Can be used in a space-saving manner ● For other functions and details, please download the catalog.
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basic information
Optimal 5-axis stage for vertical exposure devices 【Features】 ○ Multi-axis stage equipped with Z-axis, θ-axis, and tilting function in addition to XY axes ○ Equipped with functions necessary for mask alignment ○ Allows for particle-free operation due to vertical arrangement ○ Can be used in a space-saving manner ● For other functions and details, please download the catalog.
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Company information
Leveraging our experience in the development of semiconductor-related equipment, we established a company with a small team of production technology experts to undertake development tasks that are difficult for large corporations to accomplish in a short period of time, while also focusing on cost performance. Our motivation is to utilize our ideas to enter the market, promote Japanese production that can compete globally, and revive the declining "manufacturing Japan." We are challenging ourselves to develop and supply precision slide mechanisms that can respond to low costs and short delivery times, which large companies are unable to achieve.
