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  6. HEAT-3

HEAT-3

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last updated:Apr 23, 2024

テクノポート
テクノポート
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Multi power supply that can be used for the deposition source from sample heating.

Sample heating supports resistance heating and EB heating, and PID temperature control is possible from -200 degrees to 2200 degrees in 0.1-degree increments using K-type and C-type thermocouples. Additionally, it can serve as a temperature control power supply for deposition cells, allowing for control of two zones of heaters, making it suitable for organic cells as well. All operations are via a touch panel, offering excellent usability and high-quality control power supply that takes safety into consideration.

    Other measurement, recording and measuring instruments
ATS.jpg

HEAT-3

ATS.jpg
ATS.jpg

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Applications/Examples of results

● Vacuum measurement in the accelerator system ● Vacuum measurement on the surface device ● Vacuum measurement within the load lock system

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BA/Pirani exchange type ATS series

BA/Pirani exchange type ATS series

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Testing, Analysis and Measurement

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Teknoport has been the exclusive agent in Japan for overseas vacuum manufacturers, providing vacuum parts and vacuum component products to many domestic users for over 10 years. In addition to these sales achievements, we take pride in contributing to the development of the industry by introducing excellent overseas products to domestic vacuum manufacturers. Moving forward, we will continue to focus on the development and sales of products that meet the needs of our customers and the market, including new products, and we will strive daily to be of even greater service to everyone.

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