Supercritical fluid cleaning and drying equipment
Supercritical fluid cleaning and drying equipment
It is possible to clean and dry without damaging microstructures.
By replacing the conventional "process of substituting with liquefied carbon dioxide" with the "process of substituting with supercritical carbon dioxide"... ● By preheating the liquefied carbon dioxide pumped into the chamber, it is introduced as a low-viscosity supercritical fluid, allowing for cleaning and drying with minimal damage to nanometer-level fine structures. ● The absence of temperature cycles for cooling and heating the chamber enables cleaning and drying at a constant temperature, which allows for a reduction in processing time. ● By programmatically controlling the heater, automatic pressure adjustment valve, and pump, efficient depressurization from the rinsing liquid using supercritical fluid to atmospheric pressure can be achieved without creating a closed system.
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basic information
◆Micro machines and device structures are entering the nano realm for enhanced performance and functionality. ◆With this miniaturization, structures are becoming fragile, leading to issues where slight external forces (capillary forces and surface tension) during cleaning and drying processes cause deformation. ◆The capillary forces and surface tension, which are the causes of deformation, occur between different phases, such as liquid and gas, and do not occur within the same phase. ◆Supercritical cleaning and drying systems can perform cleaning and drying without deforming fine structures due to a system that does not generate capillary forces or surface tension.
Price information
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Delivery Time
P4
Applications/Examples of results
Drying after wet etching process of micro machines (MEMS)
Company information
RyuSyo possesses advanced technologies in various fields (microelectronics, computers, communications, mechatronics, optics, ultrasound, X-rays, biotechnology, etc.) and creates unique new products through its composite technologies. Additionally, it can combine these technologies with control technologies (environmental control, combustion control, communication control, etc.), allowing it to cater to a wide range of fields.