List of Clean Room products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Achieving stable rolling resistance under atmospheric pressure to vacuum conditions.

• Semiconductor inspection/test equipment
• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

Optimal for use in a vacuum environment where oil cannot be used.

• Oxidation/Diffusion Device
• Ion implantation equipment
• Other clean room equipment and facilities

Clean room

• Other clean room equipment and facilities

Stainless steel chair

• Other clean room equipment and facilities

Stainless steel wagon

• furniture
• Other clean room equipment and facilities

Stainless steel shelf

• furniture
• Other clean room equipment and facilities

5"6"9" mask case

• Electron beam lithography equipment
• Other clean room equipment and facilities
• Other optical parts

Bar-type ionizer

• Assembly Machine
• Other clean room equipment and facilities
• Ionizers and static eliminators

Fan-type ionizer

• Assembly Machine
• Other clean room equipment and facilities
• Ionizers and static eliminators

Point-type ionizer

• Assembly Machine
• Other clean room equipment and facilities
• Ionizers and static eliminators

300mm wafer case

• Semiconductor inspection/test equipment
• Other clean room equipment and facilities
• Wafer processing/polishing equipment

LED inspection lamp

• Other clean room equipment and facilities
• Other environmental equipment
• Lighting for image processing

EFEM（Equipment Front End Module）

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

FOUP/FOSB compatible wafer transfer system (300mm wafer transfer system)

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

SMIF-compatible wafer sorter (SMIF-compatible wafer transfer device)

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment