List of Machine elements products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Ultra-compact piezo-driven linear stage for semiconductor devices with a maximum stroke of 33mm.

• Other machine elements

Maximum 12 mm/s, 50 N high thrust. Sub-nanometer resolution PICMAWalk actuator ideal for semiconductor inspection processes.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Maximum 1800µm long stroke and nano precision. Position measurement without physical contact using a unique capacitive sensor.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Innovating the semiconductor manufacturing process with nanometer-level precision.

• Other machine elements
• Other industrial robots
• encoder

A compact stage that achieves zero friction and high-precision positioning of ±0.2 µm.

• Other machine elements
• Cartesian Robot
• encoder

Achieves high rigidity with an opening, eccentricity and flatness of less than 1µm.

• Actuator
• Other industrial robots
• encoder

Lightweight & high load-bearing stacking solution

• Other machine elements