List of Vacuum Equipment products
- classification：Vacuum Equipment
1～15 item / All 2922 items
Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.
- air conditioning
Custom sizes and diameters are available! We can provide wear-resistant coatings with excellent tribological properties.
- Sealing
- Other machine elements
Metal seal for canisters. Good news for substances that cannot use resin or elastomer seal materials! By adopting metal seals, helium leak tightness has been achieved.
- Sealing
- Chemicals
- Other semiconductor manufacturing equipment
Excellent leakage tolerance and corrosion resistance! We provide products customized to the sealing characteristics that meet our customers' applications.
- Sealing
Here are some important points to consider when selecting metal seals such as spring-energized C-rings! <Materials available upon request>
We will introduce important points for making metal seals functional, as well as key considerations for designers, from a high-performance seal manufacturer of products such as spring-energized C-rings, metal seals like HELICOFLEXⓇ, and metal hollow O-rings. The selection of metal seals is crucially dependent on the design of the corresponding flanges. Factors such as the material of the flanges and bolts, the tightening load (minimum required bolt load during tightening), pressure, temperature, and the method of bolt fastening are all related to the occurrence of insufficient compression in metal seals. *For more detailed information, please download from the related catalog.
UHP/UHV, ultra-high purity, ultra-high vacuum, advanced metal sealing solutions for ultra-low temperature.
- Sealing
- CVD Equipment
- Etching Equipment
"Replace rubber O-ring to metal seal, Eliminate gas permeation and gas release." This can be possible with Delta Beta HNRV.
- Sealing
- CVD Equipment
If you want to eliminate gas permeation and gas release with a vacuum rubber O-ring, replace it with a spring-energized C-ring! 'Delta Beta HNRV'
The Delta Beta HNRV is originally designed with a low tightening pressure (Y) HELICOFLEX Delta seal combined with a specially processed internal spring, achieving replacement of rubber O-rings and improved performance. This metal seal is recommended for those who have concerns such as "wanting to eliminate gas permeation and gas release from rubber O-rings" and "unable to change the number or size of bolts on existing flanges." 【Features】 ■ Mainly for ultra-high vacuum use ■ Even lower design tightening pressure than before ■ Can be exchanged with elastomer O-rings ■ Two delta-shaped protrusions on the contact side of the cross-section It does not guarantee compatibility with existing flanges. Specifications for existing flanges are required. *For more details, please download the PDF or feel free to contact us.
Delta Seal (HNV HELICOFLEX(R) DELTA) achieves ultra-high vacuum! [Standardized for JIS V-groove flanges]
- Sealing
- CVD Equipment
- Etching Equipment
[Standardized for JIS V Groove Flange] Low Tightening Pressure Y 'Ultra High Vacuum Delta Seal' for Semiconductor Field
The Delta Seal (HNV HELICOFLEX(R) DELTA) has two delta-shaped protrusions on the contact side of the cross-section. The delta-shaped protrusions are designed to collapse and disappear during the compression of the outer casing when the flange groove is assembled. The design tightening pressure of the Delta Seal is lower compared to the Helicoflex seal, allowing for replacement with elastomer O-rings. Leak rate: *For circular shapes, 10⁻¹² Pa·m³/sec. (10⁻¹¹ atm·cm³/sec.) *Depends on the quality of the installation side. 【Features】 ■Two delta-shaped protrusions on the contact side of the cross-section ■Achieves ultra-high vacuum ■Has excellent elasticity and can be used at high temperatures ■Can be replaced with elastomer O-rings *For more details, please refer to the PDF document or feel free to contact us.
Introducing C-rings for hydrogen leakage prevention in SOFC (Solid Oxide Fuel Cell) cell stacks.
- Sealing
- Other machine elements
Reduce the Y of the HelicoFlex! It maintains functionality even under positive pressure and high temperatures!
- Sealing
- Other machine elements
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No need to change the size or number of existing bolts? A must-see for those struggling with "wanting to eliminate gas permeation and gas release from vacuum rubber O-rings" in semiconductor manufactu...
- Sealing
- CVD Equipment
- Electron beam lithography equipment
If you want to eliminate gas permeation and gas release with a vacuum rubber O-ring, replace it with a spring-energized C-ring! 'Delta Beta HNRV'
The Delta Beta HNRV is originally designed with a low tightening pressure (Y) HELICOFLEX Delta seal combined with a specially processed internal spring, achieving replacement of rubber O-rings and improved performance. This metal seal is recommended for those who have concerns such as "wanting to eliminate gas permeation and gas release from rubber O-rings" and "unable to change the number or size of bolts on existing flanges." 【Features】 ■ Mainly for ultra-high vacuum use ■ Even lower design tightening pressure than before ■ Can be exchanged with elastomer O-rings ■ Two delta-shaped protrusions on the contact side of the cross-section It does not guarantee compatibility with existing flanges. Specifications for existing flanges are required. *For more details, please download the PDF or feel free to contact us.
It is used in the most demanding/critical environments such as accelerators, aerospace, and nuclear fusion reactors!
- Sealing
- Other machine elements