List of Vacuum Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Ideal water-sealed vacuum pump for exhaust gases containing water vapor and water droplets.

• Other pumps
• Vacuum pump

Regular maintenance achieves a long life of once every six years! An air-cooled dry vacuum pump that pursues a reduction in total costs!

• Other laboratory equipment and containers
• Other pumps
• Vacuum pump

High-durability dry vacuum pump suitable for all processes! Specialized for process performance.

• Vacuum pump
• others

Large displacement pumps that accommodate the increase in diameter of wafers and FPDs.

• Vacuum pump
• others

Achieving the world's smallest class size and power simultaneously! Can be integrated into all types of manufacturing equipment.

• Vacuum pump
• others

Not just energy-saving - Usable for a wide range of applications from light loads to etching.

• Vacuum pump
• Vacuum Equipment

Achieving the world's number one low power consumption in medium processes such as etching! New release with a new exterior design.

• Vacuum pump

A dry vacuum pump with excellent process resistance! New release with a new exterior design.

• Vacuum pump

Improving quietness while inheriting the reliability of the maintenance cycle. A complete redesign of the appearance! NeoDry-G series.

• Vacuum pump
• Scanning Electron Microscope
• Electron microscope