List of Semiconductor Manufacturing Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Slit valve seal

• CVD Equipment
• Etching Equipment
• Other semiconductor manufacturing equipment

Adhesion prevention seal

• Oxidation/Diffusion Device
• CVD Equipment
• Pneumatic Equipment

Perfluoroelastomer!! It is a perfluoroelastomer with excellent heat resistance and chemical resistance. Our company is the official distributor of Kalrez in Japan.

• Oxidation/Diffusion Device
• CVD Equipment
• Etching Equipment

Fluororubber with excellent long-term durability!! It can withstand high temperatures (200-220°C) compared to conventional fluororubber.

• Oxidation/Diffusion Device
• CVD Equipment
• Vacuum Equipment

High-performance metal seals!! Ideal for various vacuum equipment and semiconductor manufacturing devices!

• Oxidation/Diffusion Device
• CVD Equipment
• Sealing

Thin film formation at room temperature and atmospheric pressure! Using inexpensive film materials! Immediate delivery campaign ongoing.

• Other processing machines
• Coater
• others

Experimental small slit coater ・Substrate size: 200mm ・Viscosity: several cps to 10,000 cps ・Film thickness: 0.5 to 100μm

• Coater

Experimental and development slit coater ・Substrate size: 200mm□ ・Rental period: 6 months (MAX) *From thin films to high viscosity

• Coater

Lightweight and compact tabletop type

• Coater

Possible experimental size: 600×700mm (maximum) Lamp illuminance: 50–140mW Contract processing testing available Demo unit available for loan

• Coater

High-intensity 172nm excimer lamp, surface illuminance of 150mW/cm² or more.

• Coater

Automatic spin coater for LCD photomasks from G2 to G6.

• Coater

High-performance film and organic EL roll-to-roll plasma equipment

• Other semiconductor manufacturing equipment

Laminating equipment compatible with a variety of films and glass.

• Other semiconductor manufacturing equipment

Functional film and organic EL cleaning device

• Other semiconductor manufacturing equipment