List of Industrial Robots products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

It features an energy-saving design using a full-axis stepping motor.

• Transport and handling robots
• Other industrial robots

By reducing the footprint, the equipment layout can be downsized.

• Transport and handling robots
• Other industrial robots

The exchange of wafers can be done in a short time with two arms.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

• Transport and handling robots
• Other industrial robots

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

• Transport and handling robots
• Other industrial robots

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

• Transport and handling robots
• Other industrial robots

Equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR inside the device.

• Transport and handling robots
• Other industrial robots

A buffer function has been implemented in the Alaina, allowing for wafer replacement.

• Transport and handling robots
• Other industrial robots

It is possible to position the susceptor at high speed and high precision using a gripping method in a vacuum environment.

• Transport and handling robots
• Other industrial robots

Alignment possible with minimized wafer damage using the Bernoulli method.

• Transport and handling robots
• Other industrial robots

It is possible to minimize contact with the wafer by adopting an edge grip method.

• Transport and handling robots
• Other industrial robots

Support for transport requiring positioning of wafers (silicon, GaAs, glass).

• Transport and handling robots
• Other industrial robots

Alignment of 2-inch, 3-inch, and 100-150mm wafers is possible.

• Transport and handling robots
• Other industrial robots