List of Industrial Robots products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.

• Other machine elements
• Cartesian Robot
• encoder

Supports optical system adjustments with nanometer-level precision.

• Other machine elements
• Other industrial robots
• encoder

A compact yet high-precision reference-class 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.

• Other machine elements
• Cartesian Robot
• encoder

Optimize the manufacturing process with a compact yet high-precision 6-axis positioning system.

• Actuator
• Other industrial robots
• encoder

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Zero-friction flexure guide integrated structure. Improved calibration accuracy with high reproducibility nano-positioning.

• Other industrial robots
• Piezoelectric Devices
• Actuator

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

30kg load capacity; ±0.1µm reproducibility of a 6-axis high-rigidity hexapod.

• Actuator
• Other industrial robots
• encoder

High-precision positioning of heavy objects up to 250 kg. Equipped with an absolute encoder.

• Actuator
• Other industrial robots
• encoder

±0.2µm reproducibility and 6-axis high precision control. For precise alignment of astronomical optical systems.

• Actuator
• Other industrial robots
• encoder

High-precision hexapod supporting advanced bioimaging with 6 degrees of freedom control.

• Actuator
• Other industrial robots
• encoder

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

±0.2µm reproducibility, heavy-load compatible model with absolute encoder

• Actuator
• Other industrial robots
• encoder

High-rigidity hexapod achieving 6 degrees of freedom alignment with nanometer resolution.

• Actuator
• Other industrial robots
• encoder

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Compact linear stage with built-in limit switch and DC stepping motor!

• Actuator
• Cartesian Robot
• encoder

Motion angle: ±5 mrad (optical ±10 mrad), dynamic & high resolution & high-speed operation due to a resonance frequency of 10 kHz.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

High-resolution incremental linear encoder! The unidirectional reproducibility is 0.1μm.

• Linear motor
• Actuator
• Cartesian Robot

Achieve high stability with a distortion-free aluminum base! High specifications unique to German manufacturing!

• Actuator
• Cartesian Robot
• encoder

Single-sided and double-sided, upright and low-profile, high-precision alignment routine.

• Optical Experimental Parts
• Other industrial robots
• Actuator

Based on customer feedback, we have improved the driving precision of the Hexapod! It now enables step movements of 40 nm on the XY axis and 20 nm on the Z axis.

• Actuator
• Other industrial robots
• encoder

Designed for high load applications with a load capacity and rigidity of 30kg.

• Actuator
• Other industrial robots
• encoder

High-precision 6-axis control that achieves a maximum load capacity of 30kg and a reproducibility of ±0.1µm.

• Actuator
• Other industrial robots
• encoder

±0.2µm reproducibility, heavy load compatible model with standard absolute encoder.

• Actuator
• Other industrial robots
• encoder

6DoF photonics alignment that achieves both nano-level precision and high-speed scanning.

• Optical Experimental Parts
• Other industrial robots
• Actuator

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

• Linear motor
• Actuator
• Cartesian Robot

Flexible combination of axis configuration and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage compatible with XYZ axis, size 60mm square.

• Actuator
• Cartesian Robot
• encoder

Height 14 mm, φ36 mm opening, ideal for fine adjustment of optical systems.

• Actuator
• Other industrial robots
• encoder

Thin type with a height of 14 mm, an opening of φ36 mm, ideal for microscope scanning.

• Actuator
• Other industrial robots
• encoder

High-precision positioning stage ideal for laser cutting and laser processing.

• Actuator
• Cartesian Robot
• encoder

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Precision and smooth adjustment work for optical instruments. High-precision linear stage.

• Other machine elements
• Other industrial robots
• Solenoid Actuators

High-Precision XY Stage V-P01 for Microscope Observation and Automatic Imaging

• Other machine elements
• Cartesian Robot
• encoder

Linear motor stage with a maximum stroke of 800mm, achieving high-speed and high-precision transport.

• Other machine elements
• Linear motor
• Cartesian Robot

High-speed 4 m/s × high resolution to enhance the precision of positioning in research and development.

• Other machine elements
• Linear motor
• Cartesian Robot