List of Actuator products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Flatness of 5 nm, resolution of 0.3 nm, achieving high-speed and high-precision operation with an XY-axis piezo scanner.

• Actuator
• Piezoelectric Devices
• encoder

A high dynamic system with a center opening that suppresses vibration to the limit. It achieves a linear stroke of 100 x 100 μm.

• Actuator
• Piezoelectric Devices
• encoder

Innovating semiconductor manufacturing with sub-nanometer resolution positioning.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Height 14 mm, φ36 mm opening, ideal for fine adjustment of optical systems.

• Actuator
• Other industrial robots
• encoder

Thin type with a height of 14 mm, an opening of φ36 mm, ideal for microscope scanning.

• Actuator
• Other industrial robots
• encoder

The built-in incremental encoder has a resolution of up to 4μ rad! It performs precise position control.

• Actuator
• Other industrial robots
• encoder

Size 50x50x19mm, infinite rotation, maximum 720°/s, self-locking when power is off.

• Actuator
• Other industrial robots
• encoder