List of Actuator products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Supports positioning in semiconductor manufacturing with high thrust and high precision.

• Servo
• cylinder
• Actuator

Electric hydraulic servo cylinder achieving high thrust and high precision.

• Servo
• cylinder
• Actuator

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Precision positioning at the nano level with a 66 mm opening × maximum 300 µm on the XYZ axis.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Built-in actuator with a maximum speed of 12 mm/s and a driving force of 50 N for nano-positioning operations.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ideal for the field of nanotechnology. A linear stage that achieves both high generation power and sub-nanometer precision.

• Other machine elements
• Actuator
• Piezoelectric Devices

High-precision 6-axis control that achieves a maximum load capacity of 30kg and a reproducibility of ±0.1µm.

• Actuator
• Other industrial robots
• encoder

High-precision hexapod supporting advanced bioimaging with 6 degrees of freedom control.

• Actuator
• Other industrial robots
• encoder

High-rigidity hexapod achieving 6 degrees of freedom alignment with nanometer resolution.

• Actuator
• Other industrial robots
• encoder

Based on customer feedback, we have improved the driving precision of the Hexapod! It now enables step movements of 40 nm on the XY axis and 20 nm on the Z axis.

• Actuator
• Other industrial robots
• encoder

No need for brake stoppers! Self-locks at the stopped position during work elevation! Easier to operate than screw types, making it suitable for women! Solves labor shortages and improves productivity...

• Actuator

Linear stage for achieving high-precision positioning in cell observation.

• Other machine elements
• Actuator
• Piezoelectric Devices

Linear stage with a stroke of 25mm or more driven by piezo walk.

• Other machine elements
• Actuator
• Piezoelectric Devices

High-precision positioning of heavy objects up to 250 kg. Equipped with an absolute encoder.

• Actuator
• Other industrial robots
• encoder

±0.2µm reproducibility, heavy-load compatible model with absolute encoder

• Actuator
• Other industrial robots
• encoder

No need for brake stoppers! Self-locks at the stopped position during work elevation! Lighter operability than screw types, faster elevation speed, and space-saving achieved!

• Actuator

No need for brake stoppers! Self-locks at the stopped position during work elevation! Lighter operability than screw types, faster lifting speed, and space-saving achieved!

• Actuator

Part thickness 0.1 mm, flatness within 0.01 mm, thin-walled flat parts.

• Plastic Mould
• Actuator
• Other Connectors

We specialize in the manufacturing of precision small parts in the 15mm size range. We have obtained a medical device manufacturing registration certificate. You can rely on us for plastic hollow micr...

• Plastic Mould
• Actuator
• Other Connectors

±0.2µm reproducibility and 6-axis high precision control. For precise alignment of astronomical optical systems.

• Actuator
• Other industrial robots
• encoder

±0.2µm reproducibility, heavy load compatible model with standard absolute encoder.

• Actuator
• Other industrial robots
• encoder

30kg load capacity; ±0.1µm reproducibility of a 6-axis high-rigidity hexapod.

• Actuator
• Other industrial robots
• encoder

Designed for high load applications with a load capacity and rigidity of 30kg.

• Actuator
• Other industrial robots
• encoder

Nano-level scanning supporting high magnification observation. Z-chip tilt piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

Piezo stage with an opening that achieves nano-level adjustments.

• Actuator
• Piezoelectric Devices
• encoder

The nano-level motion amount is 100µm and 200µm on the Z-axis, with chip tilt axes of 1mrad and 2mrad, and is optimal for transmitted light with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

Zero-friction flexure guide integrated structure. Improved calibration accuracy with high reproducibility nano-positioning.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Three-stage electric lifting device ideal for lifting heavy objects.

• Actuator

No need for brake or stopper! Self-locks at the stopped position during work elevation! Lighter operability than screw types, faster lifting speed, and space-saving achieved!

• Actuator

Minimum 10 nm resolution. High-precision Z-axis focus control of the laser processing head.

• Other machine elements
• Actuator
• Solenoid Actuators

High-precision Z-axis supporting fine observation with a minimum movement of 10nm, maximum travel of 7mm, and passive holding up to 1kg.

• Other machine elements
• Actuator
• Solenoid Actuators

Minimum 10 nm resolution, maximum 7 mm stroke. Achieving high-precision Z-axis focus control for semiconductor devices.

• Other machine elements
• Actuator
• Solenoid Actuators

Minimum 10nm operation, maximum 7mm movement, supports up to 1kg. High-precision Z-axis supporting fine observation.

• Other machine elements
• Actuator
• Solenoid Actuators

Enhancing the accuracy of cell observation and deep imaging — Nano-precision Z-axis focus stage

• Other machine elements
• Actuator
• Solenoid Actuators

A dedicated servo controller featuring a high-speed CPU has been introduced, enabling advanced load control, speed control, and positioning control with simple operation in a hydraulic servo system.

• Servo
• cylinder
• Actuator