List of Actuator products

We provide comprehensive support from design to manufacturing and maintenance!

• Contract manufacturing

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

Achieving a holding force of up to 800N and a resolution of 5nm. High-thrust piezo drive supporting high-precision positioning in semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Other machine elements

Long-distance nanopositioning PiezoWalk® drive. High resolution and compact design.

• Actuator
• Linear motor
• Piezoelectric Devices

A compact piston seal with excellent retention capability under pressure, low starting friction, and low dynamic friction.

• Hydraulic Equipment
• cylinder
• Actuator

High-thrust piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

High-thrust piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

High-resolution piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

High-resolution piezo actuator for achieving nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

A photonics solution that significantly reduces alignment time with high-speed 6-degree-of-freedom control.

• Optical Experimental Parts
• Other industrial robots
• Actuator

6DoF photonics alignment that achieves both nano-level precision and high-speed scanning.

• Optical Experimental Parts
• Other industrial robots
• Actuator

Flexible combination of axis configuration and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

High-precision multi-axis system corresponding to the XY+Z configuration. Optimal configuration can be achieved according to the application.

• Linear motor
• Actuator
• Cartesian Robot

A multi-axis motion system that can be freely configured with the number of axes and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

• Linear motor
• Actuator
• Cartesian Robot

Compact actuator with high holding force, ideal for fine adjustment of mirrors and optical elements.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Precise control of microscope focus with a maximum stroke of 13 mm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Long-term stabilization of microscope focus with inertial drive and position feedback.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Long-term stable optical fine-tuning with inertial drive and position feedback.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Thin and high-precision air bearing rotation stage, ideal for optical system adjustments.

• Actuator
• Other industrial robots
• encoder

Slim and high precision. Enhancing the positioning accuracy in semiconductor manufacturing.

• Actuator
• Other industrial robots
• encoder

A large-angle drive stage optimal for beam control in optical communication and optical systems.

• Actuator
• Solenoid Actuators
• Optical Experimental Parts

High-speed mirror stage for precise control of laser beams.

• Actuator
• Solenoid Actuators
• Optical Experimental Parts

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage compatible with XYZ axis, size 60mm square.

• Actuator
• Cartesian Robot
• encoder

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Flatness of 5 nm, resolution of 0.3 nm, achieving high-speed and high-precision operation with an XY-axis piezo scanner.

• Actuator
• Piezoelectric Devices
• encoder

Innovating semiconductor manufacturing with sub-nanometer resolution positioning.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Height 14 mm, φ36 mm opening, ideal for fine adjustment of optical systems.

• Actuator
• Other industrial robots
• encoder

Thin type with a height of 14 mm, an opening of φ36 mm, ideal for microscope scanning.

• Actuator
• Other industrial robots
• encoder

Size 50x50x19mm, infinite rotation, maximum 720°/s, self-locking when power is off.

• Actuator
• Other industrial robots
• encoder

For positioning samples in a microscope. High precision, space-saving, self-locking.

• Linear motor
• Piezoelectric Devices
• Actuator

Compact linear stage suitable for micromanipulation.

• Linear motor
• Actuator
• Piezoelectric Devices

Provides sub-nanometer resolution. 0.1nm resolution and high linearity vertical positioning.

• Actuator
• Piezoelectric Devices
• encoder

0.1 nm resolution and 0.02% linearity. Improved manufacturing and measurement accuracy with sub-nanometer Z-axis control.

• Actuator
• Piezoelectric Devices
• encoder

Easy nano positioning with 0.1nm resolution and high stability control.

• Actuator
• Piezoelectric Devices
• encoder

Stabilizing nano-level measurements with 0.1nm resolution and high linearity.

• Actuator
• Piezoelectric Devices
• encoder

For nano-precision scanning of microscope samples. Achieving stable positioning with 0.1nm resolution and high linearity.

• Actuator
• Piezoelectric Devices
• encoder

Achieving high-precision positioning in semiconductor manufacturing. Quick and accurate alignment operations.

• Actuator
• Piezoelectric Devices
• encoder

Electric hydraulic servo cylinder achieving high thrust and high precision.

• Servo
• cylinder
• Actuator

Supports positioning in semiconductor manufacturing with high thrust and high precision.

• Servo
• cylinder
• Actuator