List of Special Pump products

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

This series is suitable for devices for gases, gas transfer, storage, and circulation lines.

• Other pumps
• Positive Displacement Pump
• Special Pump

A medium-sized model with a wide range of applications for both discharge pressure and flow rate. It has a proven track record in circulation applications such as semiconductor process gases and heliu...

• Other pumps
• Positive Displacement Pump
• Special Pump

[For gases] Compact and lightweight standard series. Suitable for sampling and analysis!

• Other pumps
• Positive Displacement Pump
• Special Pump

Single head type for gas use with a high flow rate series. Capable of boosting pressure up to 280 kPa. It has a wealth of proven results in various research and experimental applications.

• Other pumps
• Positive Displacement Pump
• Special Pump

Double head type series for gases. Design adaptations are possible according to various applications.

• Other pumps
• Positive Displacement Pump
• Special Pump

The double head type series for gases with the highest flow rate. It can be increased in quantity in parallel.

• Other pumps
• Positive Displacement Pump
• Special Pump

Series suitable for use with high-temperature gases up to 230°C. In addition to high-temperature gases, it is also ideal for sampling and analysis of exhaust gases.

• Other pumps
• Positive Displacement Pump
• Special Pump

This is a single-head series for high-temperature gas applications. It can be pressurized up to 280 kPa.

• Other pumps
• Positive Displacement Pump
• Special Pump

[For gases] A series of double heads compatible with high-temperature gases. It offers the largest flow rate lineup among high-temperature types.

• Other pumps
• Positive Displacement Pump
• Special Pump

Usable for gas applications with a pressure increase of 275 kPaG or more, suitable for circulation purposes!

• Other pumps
• Positive Displacement Pump
• Special Pump

[For gas] The double bellows structure completely shuts off leaks to the outside!!

• Other pumps
• Positive Displacement Pump
• Special Pump