List of Vacuum pump products

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!

• Other pumps
• Vacuum Equipment
• Vacuum pump

Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Ultra-high vacuum specification turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

High flow rate turbo molecular pump compatible with exhaust and low vibration.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Turbo molecular pump developed for use in radiation environments!

• Other pumps
• Vacuum Equipment
• Vacuum pump

Equipped with user flexibility, consistent performance anywhere in the world.

• Vacuum pump

We provide solutions for demanding chemical process applications with a combination of vacuum pumps and vacuum solutions that have a proven track record overseas.

• Other pumps
• Vacuum pump
• Positive Displacement Pump

We will introduce vacuum solutions related to the manufacturing process of lithium batteries.

• Vacuum pump
• Other pumps
• Positive Displacement Pump

Edwards has extensive experience in many thin film processes, including vacuum deposition, sputtering, CVD, and plasma polymerization.

• Other pumps
• Vacuum pump
• Positive Displacement Pump

We would like to introduce Edwards' water-sealed pumps, which have a proven track record of implementation worldwide.

• Positive Displacement Pump
• Other pumps
• Vacuum pump

We are introducing vacuum solutions related to the de-gassing process of steelmaking.

• Vacuum pump
• Positive Displacement Pump
• Other pumps

Oil rotary vacuum pumps that can be selected according to the user's needs!

• Vacuum pump

It can be used as a vacuum or a compressor!

• Vacuum pump

Mils' rotary vacuum pumps prove their value in various applications around the world!

• Vacuum pump