List of Vacuum pump products

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Oil-free, compact design, high-performance dry pump.

• Vacuum pump
• Vacuum Equipment
• Other pumps

Equipped with a full-wing rotating wing, suitable for ultra-high vacuum. For electron microscope inspection and semiconductor applications.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

An industrial dry pump equipped with the latest technology, based on experience and achievements in semiconductor processes.

• Vacuum pump
• Vacuum Equipment
• Other pumps

Rich in variety and sturdy! Low vibration and low noise! Achieves excellent vacuum levels!

• Vacuum pump
• Vacuum Equipment
• Other pumps

Adopts magnetic bearing control method! A control unit integrated design that achieves space-saving and low vibration.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

Lightweight! Compact! Durable high vacuum exhaust system with a dry specification.

• Vacuum pump
• Ventilation and Exhaust

Long hours of stable operation, clean exhaust without the use of hydrocarbons. Ideal for electron microscope inspection and semiconductor applications.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

It is a compact turbo molecular pump that is oil-free and maintenance-free.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

It is an oil-free compact turbo molecular pump.

• Vacuum pump
• Vacuum Equipment
• Turbo Pump

It is an oil-free compact turbo molecular pump.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

Lightweight! Compact! Durable high vacuum exhaust system with a dry specification.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

Lightweight! Compact! Durable high vacuum exhaust system with a dry design.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

Industry-leading basic performance

• Vacuum pump
• Vacuum Equipment
• Other pumps

Industry-leading basic performance

• Vacuum pump
• Vacuum Equipment
• Other pumps

We accept processing and modifications tailored to your requests, as well as the production of new tanks!

• tank
• Other pumps
• Vacuum pump