List of CVD Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Module heater for CVD coating equipment

• Steel
• CVD Equipment

Pipe heaters and cylinders prevent heat loss! Reduce power consumption and CO2 emissions! Shapes and materials can be freely customized according to application!

• Injection Molding Machine
• Extrusion Machine
• CVD Equipment

Ensure a flow rate of up to 1,000 lpm.

• CVD Equipment
• Etching Equipment
• Evaporation Equipment

Excellent uniformity of film thickness and impurity concentration. Atmospheric pressure CVD equipment that achieves high productivity and low cost.

• CVD Equipment

A very compact atomic layer deposition device with a rich process recipe.

• CVD Equipment
• Other surface treatment equipment

White type perfluoroelastomer material with O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

Heat-resistant perflo (high temperature resistance: 300°C) material without filler using O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

White type heat-resistant perfluoroelastomer (high temperature resistance: 280°C) material with O-ring cherry blossom seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

White type of ternary fluorine rubber material with cherry blossom seal of O-ring.

• Other machine elements
• CVD Equipment
• Piping Materials

White type of Bition ETP (FFKM-E) material with O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

High hardness type Afuras (FEPM) material with O-ring cherry seal.

• Other machine elements
• CVD Equipment
• Sealing

Heat-resistant trivalent fluorine rubber (high temperature resistance: 250°C) material with O-ring cherry seal.

• Other machine elements
• CVD Equipment
• Sealing

Old grade of heat-resistant perfluoroelastomer (high temperature resistance -300℃) material with O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

Standard type Aflas (FEPM) material with O-ring cherry seal.

• Other machine elements
• CVD Equipment
• Sealing

Special material (fluororubber + fluororesin) without the use of a compound material with O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements