List of Ashing device products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Introduction to Particle-PLUS Analysis Case: "Plasma Analysis of Dual Frequency CCP" Simulation Case

• Etching Equipment
• Wafer
• Ashing device

【Exhibition Participation!】Ideal for surface modification of BGA substrates and lead frames! Achieves processing effects close to vacuum RIE plasma through the adoption of a unique system!

• Ashing device

It is a versatile and compact device that enables etching, ashing, and ion cleaning!

• Etching Equipment
• Ashing device

"The lamp has a long lifespan" - Economical with low running costs!

• Ashing device

Equipped with a new plasma source HCD (hollow cathode discharge) electrode, capable of etching various metals and Cu thin films. A new type of etching device that also facilitates large-area processin...

• Etching Equipment
• Ashing device
• Plasma surface treatment equipment

We have a proven track record for customers in OSAT around the world and have established our position with reliable performance.

• Ashing device

From batch processing equipment equipped with unique wafer transfer machines to sheet processing equipment, they are used in fabs around the world for MEMS and semiconductors.

• Ashing device

Achieving high-density plasma with a simple mechanism. Compatible with substrates from wafers to 1 m². Damage-free etching of Si-based materials, metals, organic films, and various thin films.

• Etching Equipment
• Ashing device
• Plasma surface treatment equipment

H2 (Surface cleaning of various substrates using the reducing power of hydrogen plasma. Improved hydrophilicity and wettability due to the removal of surface oxide layers. A new surface cleaning techn...

• Ashing device
• Plasma surface treatment equipment
• Other surface treatment equipment

SUS304 Machining / SUS304 Cutting

• Ashing device

Compact tabletop plasma device PiPi

• Etching Equipment
• Ashing device
• Surface treatment contract service

A plasma cleaner that can be customized to meet your needs.

• Etching Equipment
• Ashing device
• Other semiconductor manufacturing equipment

50-piece batch plasma ashing system (asher) compatible with 6-inch and 8-inch wafers. There is also a wafer single-piece processing type available.

• Ashing device
• Other semiconductor manufacturing equipment

Machining/Metalworking

• Etching Equipment
• Ion implantation equipment
• Ashing device

A5056 processed products, individual items, machining processing [Leave cost reduction to Philir Co., Ltd.]

• CVD Equipment
• Ashing device
• Semiconductor inspection/test equipment