List of Cartesian Robot products

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Achieving high-precision measurements with a resolution of 0.1 µm and a maximum speed of 4 m/s.

• Other machine elements
• Linear motor
• Cartesian Robot

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

• Linear motor
• Actuator
• Cartesian Robot

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage compatible with XYZ axis, size 60mm square.

• Actuator
• Cartesian Robot
• encoder

High-Precision XY Stage V-P01 for Microscope Observation and Automatic Imaging

• Other machine elements
• Cartesian Robot
• encoder

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot