List of Cartesian Robot products

It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...

• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.

• Other machine elements
• Cartesian Robot
• encoder

Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.

• Other machine elements
• Cartesian Robot
• encoder

Improving the precision of laser cutting. Achieving high-precision positioning of ±0.2 µm.

• Other machine elements
• Cartesian Robot
• encoder

A compact air bearing stage that achieves zero friction and high-precision positioning.

• Other machine elements
• Cartesian Robot
• encoder

Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.

• Other machine elements
• Cartesian Robot
• encoder