List of Transport and handling robots products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Presentation of explanatory materials on JIS and ISO standards. We propose suitable safety barriers from a rich product series! Free rental of demo kits.

• Other safety and hygiene products

Optimal for wafer transport in an acidic or alkaline atmosphere during the LSI manufacturing process.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport and allows for quick wafer exchange.

• Transport and handling robots
• Other industrial robots

It is possible to choose between base type and flange type according to the device layout.

• Transport and handling robots
• Other industrial robots

Suitable for small wafer transport, allowing for a compact device layout.

• Transport and handling robots
• Other industrial robots

It features an energy-saving design using a full-axis stepping motor.

• Transport and handling robots
• Other industrial robots

By reducing the footprint, the equipment layout can be downsized.

• Transport and handling robots
• Other industrial robots

The exchange of wafers can be done in a short time with two arms.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

• Transport and handling robots
• Other industrial robots

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

• Transport and handling robots
• Other industrial robots

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

• Transport and handling robots
• Other industrial robots

Equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR inside the device.

• Transport and handling robots
• Other industrial robots

A buffer function has been implemented in the Alaina, allowing for wafer replacement.

• Transport and handling robots
• Other industrial robots

It is possible to position the susceptor at high speed and high precision using a gripping method in a vacuum environment.

• Transport and handling robots
• Other industrial robots