List of Transport and handling robots products

It can be used for transporting wafers inside a vacuum chamber.

• Transport and handling robots
• Other industrial robots

Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.

• Transport and handling robots
• Other industrial robots

While it is a single arm, it maintains the functionality of a twin arm.

• Transport and handling robots
• Other industrial robots

Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.

• Transport and handling robots
• Other industrial robots

Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

• Transport and handling robots
• Other industrial robots

It offers superior cost performance compared to conventional MHR.

• Transport and handling robots
• Other industrial robots

Optimal for wafer transport in an acidic or alkaline atmosphere during the LSI manufacturing process.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport and allows for quick wafer exchange.

• Transport and handling robots
• Other industrial robots

It is possible to choose between base type and flange type according to the device layout.

• Transport and handling robots
• Other industrial robots

Suitable for small wafer transport, allowing for a compact device layout.

• Transport and handling robots
• Other industrial robots

It features an energy-saving design using a full-axis stepping motor.

• Transport and handling robots
• Other industrial robots

By reducing the footprint, the equipment layout can be downsized.

• Transport and handling robots
• Other industrial robots

The exchange of wafers can be done in a short time with two arms.

• Transport and handling robots
• Other industrial robots

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

• Transport and handling robots
• Other industrial robots

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

• Transport and handling robots
• Other industrial robots

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

• Transport and handling robots
• Other industrial robots

Equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR inside the device.

• Transport and handling robots
• Other industrial robots

A buffer function has been implemented in the Alaina, allowing for wafer replacement.

• Transport and handling robots
• Other industrial robots

It is possible to position the susceptor at high speed and high precision using a gripping method in a vacuum environment.

• Transport and handling robots
• Other industrial robots

Alignment possible with minimized wafer damage using the Bernoulli method.

• Transport and handling robots
• Other industrial robots

It is possible to minimize contact with the wafer by adopting an edge grip method.

• Transport and handling robots
• Other industrial robots

Support for transport requiring positioning of wafers (silicon, GaAs, glass).

• Transport and handling robots
• Other industrial robots

Alignment of 2-inch, 3-inch, and 100-150mm wafers is possible.

• Transport and handling robots
• Other industrial robots

We have achieved a reduced footprint with small-diameter wafer compatibility.

• Transport and handling robots
• Other industrial robots

The control method is RS232C and parallel photo I/O.

• Transport and handling robots
• Other industrial robots

High-speed, high-precision positioning of silicon wafer centering and Orifla notch.

• Transport and handling robots
• Other industrial robots

Supports transportation requiring wafer positioning in semiconductor manufacturing equipment, such as inspection devices.

• Transport and handling robots
• Other industrial robots

It is possible to reduce processing costs by simplifying the shape of chamfer processing.

• Transport and handling robots
• Other industrial robots

Maintains long lifespan and high reliability in transportation, suitable for use in low outgassing environments.

• Transport and handling robots
• Other industrial robots

Compact, lightweight, and energy-efficient. Customizable. A model that pursues convenience.

• Transport and handling robots

Reduce design and manufacturing time by approximately 60%! Achieve a high-speed cycle time of 0.3 seconds! The cylinder mechanism transports items "accurately," "stably," and "quickly."

• Transport and handling robots
• Substrate transport device (loader/unloader)
• Other conveying machines

A palletizing system that accommodates everything from complex loading patterns to basic patterns.

• Transport and handling robots

High-speed and accurate transport system capable of handling large to fine workpieces.

• Transport and handling robots

Utilizing parallel link robots, we provide a high-precision handling system.

• Transport and handling robots

A large three-jaw parallel chuck with a low height, lightweight design, and a large hollow hole at the center of the body.

• Transport and handling robots

Good "things" and good relationships. We will continue to propose a system for overall optimal manufacturing.

• Transport and handling robots
• Other conveying machines
• Other network tools

This is a comprehensive catalog featuring a wide range of products, including semiconductor transport robots and aligners.

• Substrate transport device (loader/unloader)
• Transport and handling robots

Leave the delivery robots to JEL, with their proven track record and high quality.

• Transport and handling robots
• Substrate transport device (loader/unloader)

Once the manufacturing line "I want to do this!" is decided, just leave the rest to "Heiwa Harty Co., Ltd."

• Transport and handling robots