List of Other industrial robots products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.

• Transport and handling robots
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While it is a single arm, it maintains the functionality of a twin arm.

• Transport and handling robots
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Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.

• Transport and handling robots
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Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.

• Transport and handling robots
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It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

• Transport and handling robots
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It offers superior cost performance compared to conventional MHR.

• Transport and handling robots
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Optimal for wafer transport in an acidic or alkaline atmosphere during the LSI manufacturing process.

• Transport and handling robots
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It is suitable for wafer transport and allows for quick wafer exchange.

• Transport and handling robots
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It is possible to choose between base type and flange type according to the device layout.

• Transport and handling robots
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Suitable for small wafer transport, allowing for a compact device layout.

• Transport and handling robots
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It features an energy-saving design using a full-axis stepping motor.

• Transport and handling robots
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By reducing the footprint, the equipment layout can be downsized.

• Transport and handling robots
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The exchange of wafers can be done in a short time with two arms.

• Transport and handling robots
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It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

• Transport and handling robots
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Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots