List of Sensors products

  • classification:Sensors

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Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

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  • air conditioning

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Druck TERPS: Innovative vacuum pressure measurement technology supporting the semiconductor industry.

Overview and Features of TERPS • High Precision and Stability: Achieves a precision of ±0.01%FS and long-term stability of less than 0.01%FS per year, with temperature sensitivity significantly reduced through multi-point compensation. • Wide Measurement Range: Covers commonly used ranges from medium vacuum to atmospheric pressure for vacuum applications, providing a continuous measurement range from 10Pa to atmospheric pressure. • Excellent Linearity: Demonstrates very good linearity even in low-pressure regions, with positive/negative offset amounts stable at 21-23Pa in the range of 1Pa to 1000Pa. • Low Hysteresis: The single crystal silicon resonant beam exhibits negligible hysteresis in the range of 0 to 100Pa, providing high stability and reliability even in ultra-low pressure areas. • Robust Operating Temperature Range: Supports operating temperatures from -55℃ to 125℃. • High Media Compatibility: Depending on the measurement medium, options include direct exposure silicon elements, 316L stainless steel isolation diaphragms, or Hastelloy C276 specifications. • Easy System Integration: Compatible with frequency output or digital output (RS232/RS485, CANBus, USB), facilitating easy system integration.

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Cover.png

Druck TERPS: Innovative vacuum pressure measurement technology supporting the semiconductor industry.

Overview and Features of TERPS • High Precision and Stability: Achieves a precision of ±0.01%FS and long-term stability of less than 0.01%FS per year, with temperature sensitivity significantly reduced through multi-point compensation. • Wide Measurement Range: Covers commonly used ranges from medium vacuum to atmospheric pressure for vacuum applications, providing a continuous measurement range from 10Pa to atmospheric pressure. • Excellent Linearity: Demonstrates very good linearity even in low-pressure regions, with positive/negative offset amounts stable at 21-23Pa in the range of 1Pa to 1000Pa. • Low Hysteresis: The single crystal silicon resonant beam exhibits negligible hysteresis in the range of 0 to 100Pa, providing high stability and reliability even in ultra-low pressure areas. • Robust Operating Temperature Range: Supports operating temperatures from -55℃ to 125℃. • High Media Compatibility: Depending on the measurement medium, options include direct exposure silicon elements, 316L stainless steel isolation diaphragms, or Hastelloy C276 specifications. • Easy System Integration: Compatible with frequency output or digital output (RS232/RS485, CANBus, USB), facilitating easy system integration.

In addition to the conventional chromatic aberration confocal method and spectral interference method, a thickness measurement sensor utilizing laser heating has also emerged. It can measure the thick...

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  • Sensors

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2026 OPIE Exhibition Information

We will be exhibiting at OPIE 26' held at Pacifico Yokohama from April 22 to 24. Our booth will be L-37 (Light and Imaging Sensor & Imaging EXPO). We plan to showcase the 3D line sensor CLS2, a single-point thickness sensor, a distance sensor, and Enovasense, which can measure the thickness of opaque objects.

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