List of Other inspection equipment and devices products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

A positioning stage with excellent position resolution, reproducibility, and retention due to feedback control with 10nm resolution.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

[Stroke 40mm] A positioning stage with high resolution of 10nm, excellent positioning repeatability, and high position holding capability!

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

High-performance positioning stage with 10nm resolution and 50mm operation, capable of reproducibility using position information from a linear encoder in a vacuum environment.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

High-performance positioning stage operating in a 40mm range with 10nm resolution for vacuum applications.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

High-performance positioning stage with a built-in linear encoder operating at 10nm resolution, usable in a vacuum.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

Long stage with built-in linear encoder capable of 10nm resolution, usable in a vacuum.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

High-performance positioning stage with 5nm resolution, high reproducibility, and high retention that can be used in a vacuum.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

High-performance positioning stage with 5nm resolution and 40mm travel, usable in a vacuum.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

High-performance positioning stage with 5nm resolution using a linear encoder, usable in a vacuum.

• Other FA equipment
• Other microscopes
• Other inspection equipment and devices

Positioning with sub-micron resolution! Excellent reproducibility with built-in encoder, stage with a stroke of 20 to 400 mm.

• Other microscopes
• Other inspection equipment and devices

Positioning with 10nm resolution! Excellent reproducibility, stage with a stroke of 20 to 200mm.

• Other microscopes
• Other inspection equipment and devices

Positioning with 5nm resolution! Excellent reproducibility and a movable distance in the millimeter range.

• Other microscopes
• Other inspection equipment and devices

Positioning with a resolution of 1nm due to the built-in linear encoder, with a maximum movement range of 50mm.

• Other microscopes
• Other inspection equipment and devices
• Other FA equipment

Control the positioning stage with 1nm resolution!

• Other inspection equipment and devices
• controller
• Other optical parts

Streamline inspections and research! Positioning control is possible with 5nm resolution.

• Other inspection equipment and devices
• Other FA equipment