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高アスペクト比通し穴微細加工

高アスペクト比通し穴微細加工

高アスペクト比通し穴微細加工

デリケートで加工の難しいシリコンウェハーに対し、レーザーでならストレスレス加工が出来ます。 この例ではｔ０．６ｍｍの標準ウェハーに、ＴＨＧ−ＹＡＧを用いて高アスペクトの穿孔加工をしました。

  • 加工受託
  • 通し穴微細加工

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