Virtually unlimited thin film growth techniques. ●Combined UHV SPM / XPS / UPS / MBE system ●Hybrid (PLD) Laser-MBE System (based on a LAB10 MBE System) ●UHV PLD and MULTIPROBE Compact ●Charge & spin transport in graphene layers on 2 inch substrates ●III-V MBE system for film growth on 4 inch wafers ●III-N MBE system for 3 inch substrates with additional in situ VT SPM ●MBE & Catalysis ※各装置の詳細はお問い合わせください。

○FZ Juelich Cluster -Installed at the HNF (Helmholtz Nanofabrication Facility) Juelich, Germany ○IQC Cluster Tool -Installed at the Institute for Quantum Computing at the University of Waterloo, Canada ○EIT+ Cluster Tool -Installed at the Wroclaw Research Centre EIT+, Wroclaw, Poland ○UTD Cluster Tool -Installed at the University of Texas at Dallas, USA ○FW Dresden Cluster ○ Materials Innovation Platform Materials Innovation Platform ※各装置の詳細はお問い合わせください。