Piezo Nano Positioning Actuator N-216 for Semiconductors
Achieving a holding force of up to 800N and a resolution of 5nm. High-thrust piezo drive supporting high-precision positioning in semiconductor manufacturing equipment.
In semiconductor manufacturing, high-precision positioning at the nanometer level is required in processes such as wafer inspection and nano-lithography. Even slight positioning errors can lead to a decline in product quality and a deterioration in yield. The N-216 is a high-thrust linear actuator that employs PI's proprietary NEXLINE(R) PiezoWalk(R) walking drive technology. With a high resolution of 0.03nm (open loop) / 5nm (closed loop) and a maximum holding force of 800N, it achieves high-precision and stable nano-positioning in semiconductor manufacturing equipment. [Application Scenarios] - Wafer inspection equipment - Nano-lithography equipment - Semiconductor manufacturing equipment - Nano-measurement equipment - Precision positioning applications [Benefits of Implementation] - Improved yield through high-precision positioning at the nanometer level - Stable positioning performance due to high-thrust drive - Increased efficiency in manufacturing processes - Contribution to the stable production of high-quality semiconductor products
- Company:PI Japan
- Price:Other