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  6. Electric Actuator CHX (Precision Stage) [THK Official]

Electric Actuator CHX (Precision Stage) [THK Official]

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Precision Stage Series CHX

last updated:Dec 27, 2024

THK
THK
  • Official site

Achieving ultra-thin, high rigidity, and high precision.

THK's electric actuator precision stage series CHX (compact alignment stage) achieves a super-thin design for miniaturizing the top table, featuring high rigidity and high precision. It is used in various fields requiring high precision, such as optical equipment, medical devices, biotechnology, solar cells, optical lens bonding equipment, probe inspection devices, chip device exposure and printing, dispensing devices, fine laser processing machines, and alignment for chip mounters. Additionally, the related links provide more detailed product descriptions, product catalogs, specification drawings, dimension tables, and a wealth of technical information. Please take a look at those as well.

    Semiconductor inspection/test equipment
CHX-100-L.jpg

Electric Actuator CHX (Precision Stage) [THK Official]

CHX-100-L.jpg
CHX-100-L.jpg
  • Related Link - https://www.thk.com/jp/ja/products/actuator/precis…

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basic information

●Ultra-thin Design By adopting a preloaded flexible planar bearing and placing the drive module in three locations on the same plane, we have achieved an ultra-thin alignment stage. ●Compact Top Table The size of the top table is 100 to 200 mm in both length and width. A smaller top table than the conventional alignment stage CMX is available. ●Customizable Cutout Structure A cutout structure can be selected in the central part of the top table and base according to your requirements (special customization). This allows for transmission light measurement from below, simplification of wiring for machines and devices, and can be utilized as a top table inlay hole. ●Simplified Wiring Work Since the connectors for motor and sensor connections are consolidated in one direction, wiring work can be easily performed.

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THK

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Machine elements and parts

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THK pioneered the "rolling" of linear motion components in machines in 1972 and developed the "linear motion system." The development of this "linear motion system" has led to increased precision, speed, labor-saving, and improved efficiency in machinery, enabling energy-efficient equipment design. All of THK's technology is focused on providing greater lightness and precision to the "movement" of various mechanisms, bringing numerous innovations to the world. 【THK's Main Product Areas】 1. Mechanical Component Parts: - Development, manufacturing, and sales of LM guides, ball splines, ball screws, electric actuators, etc. 2. Mechatronics Related Products: - Precision XY stages, linear motor actuators, etc. 3. Automotive Parts: - Link balls, rod ends, etc. 4. Robotics: - Pick and place robots "PPR," transport robots "SIGNAS," service robots "SEED-Solutions" (including display robots and temperature measurement robots), etc. 5. Seismic Isolation: - Seismic isolation tables TSD, seismic isolation modules TGS.

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