Device lineup: Slit coater, spin coater, dip coater, tabletop coater. Capable of handling up to MaxG8 substrate size.
【Device Lineup】
Slit coater, spin coater, dip coater, tabletop coater
【Features of the Coater】
- Capable of handling substrate sizes from 10mm□ to G8.
- A coater with high coating precision and excellent uniformity for film thicknesses ranging from thin to thick (approximately 1 to 500μm).
- Available for evaluation using various test machines.
- Maintains and improves uniformity of coating from low viscosity to high viscosity (a few cp to 5,000 cp).
- Designed and manufactured according to customer applications and environments.
【Test Target Substrates, Workpieces】
- Glass: Substrate sizes from 10mm□ to G6
- Wafers: 2 inches to Φ300mm
- Functional films: MAX 400×500mm
Coating materials, viscosity
- Various chemicals: resist, ink, paste, resin-based
- Viscosity: a few cp to 5,000 cp
- Film thickness: 1 to 500μm
【Main Applications, Examples】
- Universities, research and development institutions, National Institute of Advanced Industrial Science and Technology
- Semiconductors, LCDs, organic EL, touch panels
- Functional films
- Material and material development
- Precision parts, optical parts
- Pharmaceutical and cosmetic research applications