EFEM×リバティー - List of Manufacturers, Suppliers, Companies and Products

EFEM（Equipment Front End Module）

EFEM（Equipment Front End Module）

This device is a 2-station FOUP/FOSB compatible EFEM (Equipment Front End Module). It supports wafer sizes of 200/300mm (8/12 inches). Throughput: 150 wph OCR / 450 wph transfer (excluding processes).

• Company：リバティー
• Price：Other

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment