SSY-10010 EFEM
EFEM
The 300mm wafers are taken out from the FOUP cassette and sorted. The sorting patterns can be set arbitrarily, allowing for sorting that meets customer specifications. In addition to sorting, it can also be used as a loader/unloader for the equipment. By equipping a horizontal multi-axis robot (GCR4210-500-AM), it can access four cassettes without a travel axis. The adoption of a Z-axis stroke of 500mm allows for the placement of cassettes in two vertical tiers. By equipping the robot with an inversion axis, it can transport wafers without contacting the processing surface, even in the case of bottom-side processing. A mapping sensor is installed in the wrist block to detect wafers inside the cassette. The opening and closing doors are equipped with open/close detection sensors, and they are locked during robot operation for safety considerations. A glass (transparent work) compatible aligner is included (SAL3361GR). The integration with the customer's equipment can be modified as needed (HOST communication will be handled separately). Customization according to customer specifications is possible.
- 企業：ジェーイーエル
- 価格：Other
