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  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. EFEM System for FoPLP

EFEM System for FoPLP

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last updated:Dec 18, 2022

アジアファインテック 韓国本社
アジアファインテック 韓国本社
  • Official site

All components are custom-made, allowing for flexible customization. We offer one-stop support, including software compatibility, at attractive prices.

1. Custom manufacturing of key components (Transfer Robot, EFEM, Load Port, Controller) 2. Control of key components via EFEM PC (SECS/GEM compatible) 3. Flexible customization according to customer requirements 4. Full line-up support through proprietary development and manufacturing 5. Custom dual hand robots are also available 6. Robot hand structure for warpage panels (greater than 7mm) for PLP 7. Adoption of aligners suitable for various panel sizes is also possible 8. Fine teaching capability through sensors and motors 9. Extensive experience and track record in EFEM for mass production

    Other semiconductor manufacturing equipmentSubstrate transport device (loader/unloader)
EFEM

EFEM System for FoPLP

EFEM fo FoPLP.jpg
EFEM fo FoPLP.jpg

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basic information

1. Basic configuration: EFEM main body, Loader Port, Transfer Robot, Controller System 2. Communication specifications: Ethernet (Option: SECS/GEM) 3. Number of loader ports: Up to 4 4. Board (standard): 510X515 (Th 0.5–2.0 mm), 600X600 (Th 0.2–5.0 mm) 5. Warpage: ±7 mm for 510X515, ±12 mm for 600X600

Price range

Please contact us for details

Delivery Time

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※About 4 months

Applications/Examples of results

FoPLP EFEM Sales Records (Korea) 1. 600X600 & 615X625(mm); 2P Type (48 units), 4P Type (1 unit) 2. 600X600 & 620X625(mm); 2P Type (13 units), 4P Type (1 unit)

Detailed information

  • 3.jpg

    FoPLP EFEM System Configuration

  • 4.jpg

    FoPLP EFEM System Configuration

  • 5.jpg

    Advantage

  • 6.jpg

    Robot for FoPLP

  • 7.jpg

    Robot for FoPLP

  • 8.jpg

    Aligner for FoPLP

  • 9.jpg

    EFEM System for Wafers

Company information

アジアファインテック

アジアファインテック 韓国本社

Industrial Electrical Equipment

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Based on our experience and achievements as an equipment manufacturer’s agent in the South Korean display industry, we will expand our business into environmental fields such as lithium-ion batteries and fuel cells, as well as the semiconductor packaging sector. We provide a comprehensive range of services from sales and installation of equipment to after-sales services including repairs, modifications, and overhauls. Additionally, we have a rich manufacturing network in South Korea for producing units and tools, as well as sourcing materials and electronic components, allowing us to offer comprehensive support. As a general agency that includes not only import sales in South Korea but also export sales from South Korea to Japan, we will provide comprehensive support to your company and your customers, so please feel free to contact us with any requests.

Product/Service List (29)

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